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Rayleigh Wave Velocity Mapping Using Scanning Acoustic Microscope

机译:使用扫描声显微镜的瑞利波速度测绘

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摘要

In a Scanning Acoustic Microscope (SAM) amplitude of focused acoustic beam reflected by a sample is utilized to produce acoustic images and to measure local elastic property for effective nondestructive characterization of materials. The most important acoustic rays involved in both imaging and quantitative measurements in an acoustic lens are shown in Fig.1. The extra contribution to the reflected signal from the Rayleigh waves generated at the interface between water and the sample surface enhances the contrast in acoustic images. Amplitude acoustic images produced at a defocus are very effective in revealing the microstructure structure, surface and near surface defects, flaws, micro cracks etc. On the other hand an interference between the direct reflected ray (PO) and the Rayleigh ray (AB-BC-DE-EF) [see Fig.1] produces a V(z) curve which displays periodic minima as the distance between the lens and the sample is varied. The periodicity in the V(z) curve is directly related to the Rayleigh wave velocity. This makes an acoustic microscope a quantitative tool for measurement of local elastic property. Several methodologies have been developed to analyze the V(z) curve to obtain high accuracy in the measurement of Rayleigh wave velocity. A computationally intensive procedure with additional experimental data on a sample that doesn’pt support Rayleigh waves has been velocity with an accuracy of 1 part in 104 m/s. Although this tedious and time consuming procedure is very useful for high accuracy single location measurements, time necessary to produce an image of the variation Rayleigh wave velocity over an area becomes forbiddingly too large.
机译:在扫描声显微镜(SAM)中,由样品反射的聚焦声束的振幅用于产生声像并测量局部弹性,从而对材料进行有效的非破坏性表征。图1显示了在声学透镜的成像和定量测量中涉及的最重要的声线。在水和样品表面之间的界面处产生的瑞利波对反射信号的额外贡献增强了声像的对比度。散焦时产生的振幅声像对于揭示微观结构,表面和近表面缺陷,缺陷,微裂纹等非常有效。另一方面,直接反射射线(PO)和瑞利射线(AB-BC)之间存在干涉-DE-EF)[参见图1]会产生一条V(z)曲线,随着镜头和样品之间的距离变化,该曲线会显示出周期性的最小值。 V(z)曲线中的周期性与瑞利波速度直接相关。这使得声学显微镜成为用于测量局部弹性的定量工具。已经开发了几种方法来分析V(z)曲线,以在瑞利波速度测量中获得高精度。在不支持瑞利波的样本上加上大量实验数据而进行的计算密集型过程,其速度已达到了104 m / s的精度。尽管此繁琐且耗时的过程对于高精度的单位置测量非常有用,但生成一个区域上的瑞利波速度变化图像所需的时间必定会变得太大。

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